CLEANSORB FABLINE FX exhaust gas purification is the latest version of the series, whose reliability has already been proven in several thousand CS CLEAN SOLUTIONS installations worldwide. An additional backup column of the FABLINE FX product offers the advantage of an uninterrupted two-column model, but with a smaller footprint.

Operating modes and system status are conveniently visualized and selected via a touchscreen display. Gas purging and leak testing of the absorber column are fully automated during exhaust gas purification.

Thanks to the safety and performance of all CLEANSORB chemisorber media, FABLINE FX is the model of choice for your specific process application, including:

Plasma etching , CVD , ALD , ion implantation and photovoltaics.

FABLINE FX Advantages

• Passive operating principle, requires neither electricity nor heating, fuel or water
• Made from corrosion-resistant 316L stainless steel and high-quality components
• State-of-the-art remote connection via USB, Ethernet, FTP, NTP, OPC.
• Wide range of configurations and options, including integrated blower
• Available as SEMI-S2 compliant version with redundant safety features