Plasma Conversion PCS TROPO & PCS STRATO

The PCS TROPO and PCS STRATO atmospheric plasma conversion systems are high performance plasma sources, developed to destroy perfluorinated compounds such as CF4, CHF3, SF6 and NF3 that are emitted from semiconductor etch and related processes.

The reactive by-products created by the both PCS systems are best removed using a CLEANSORB® dry bed chemisorber. For existing installations requiring PFC removal capability, the both PCS systems are readily retrofitted upstream of existing abatement systems such as central wet scrubbers.

Your advantages
  • Superior Destruction-Removal-Efficiency (DRE) of PFC gases
  • Optimized combustion with low NOx-emissions up to 50% compared to other abatement systems
  • No additional fuel gas, extremely low CoO
  • Hybrid technology using direct and indirect energy sources
  • Resource-saving, water-free operation
  • Increased productivity
  • Low installation costs
  • Low operating costs
  • Low maintenance costs

Plasma Conversion PCS EXO

The PCS EXO system is a high performance plasma source, developed to destroy NH3 which is emitted from GaN and related processes.

For existing installations requiring NH3 removal capability, the PCS EXO is readily retrofitted. Chlorine used during cleaning steps is best removed using a CLEANSORB® dry bed chemisorber.

 
Your advantages:
  • Combustion of up to 200 slm NH3 and 400 slm H2
  • Optimized combustion with low NOx-emissions up to 50% compared to other abatement systems
  • No additional fuel gas, extremely low CoO
  • Hybrid technology using direct and indirect energy sources
  • Resource-saving, water-free operation
  • Increased productivity
  • Low installation costs
  • Low operating costs
  • Low maintenance costs

We will be happy to answer specific questions you might have – please call us or send us an e-mail.